Title:
COMPOSITE PARTICLE FOR POLISHING, MANUFACTURING METHOD OF COMPOSITE PARTICLE FOR POLISHING AND SLURRY FOR POLISHING
Document Type and Number:
Japanese Patent JP2017001927
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a composite particle for polishing by carrying metal oxide on silica particles and capable of providing a smooth polished surface high in polishing rate.SOLUTION: There is provided a composite particle for polishing consisting of a composite silica particles where metal oxide is carried on a surface of silica particles and having a half width of maximum peak in X-ray diffraction using CuKα ray as a radiation source of the metal oxide by a powder X-ray diffraction measurement of over 1.0° and 2.0° or less.SELECTED DRAWING: Figure 1
Inventors:
KAWASAKI YUJI
YAMAMOTO TSUTOMU
MIYAKE JUNICHI
YAMAMOTO TSUTOMU
MIYAKE JUNICHI
Application Number:
JP2015120641A
Publication Date:
January 05, 2017
Filing Date:
June 15, 2015
Export Citation:
Assignee:
SAKAI CHEMICAL INDUSTRY CO
International Classes:
C01B33/18; B24B37/00; C09K3/14; H01L21/304
Attorney, Agent or Firm:
Atomi International Patent Office