CONTROLLING DEVICE FOR FLOW OF PARTICLE

Title:

CONTROLLING DEVICE FOR FLOW OF PARTICLE

Document Type and Number:

Japanese Patent JPS62158319

Kind Code:

A

Abstract:

PURPOSE: To enable the control of a blasting region to make it uniform by a construction wherein an opening-closing mechanism taking only particles of a definite velocity out of a flow of particles is provided in two places on the downstream side of a throttling-expanding nozzle.

CONSTITUTION: Particles of a material gas after flowing into a throttling- expanding nozzle 1 form a flow inside the throttling-expanding nozzle 1 and a converged flow as a beam after flowing out of the throttling-expanding nozzle 1. Since an opening-closing mechanism 7 is provided in two places on the downstream side, the beam-shaped flow formed by the throttling-expanding nozzle 1 is divided by the opening-closing mechanisms 7 provided in two stages and is taken out as particles having a velocity within certain limits. Besides, the particles are blown against a substrate 6 as a beam having a substantially- definite cross section of a jet stream, and therefore the region upon which the beam is driven can be controlled with ease.

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Inventors:

SUGATA MASAO
SUGATA HIROYUKI
KIMURA TOSHIAKI
KURIHARA NORIKO
DEN TORU

Application Number:

JP29900785A

Publication Date:

July 14, 1987

Filing Date:

December 28, 1985

Export Citation:

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Assignee:

CANON KK

International Classes:

H01L21/205; B05C19/00; H01L21/31; (IPC1-7): B05C19/00; H01L21/205; H01L21/31

Attorney, Agent or Firm:

Yoshio Toyota

Previous Patent: JPS62158318

Next Patent: THIN FILM CONDUCTOR OF AMORPHOUS SILICON CONTAINING MICROCRYSTALLINE PHASE