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Title:
Drive system and drive method, exposure equipment and exposure method, and device manufacturing method
Document Type and Number:
Japanese Patent JP6362024
Kind Code:
B2
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Inventors:
Koichi Sakata
Application Number:
JP2014082888A
Publication Date:
July 25, 2018
Filing Date:
April 14, 2014
Export Citation:
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Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G01B11/00; G01B11/26
Domestic Patent References:
JP2009205641A
JP2012114436A
Foreign References:
WO2013161858A1
Attorney, Agent or Firm:
Atsushi Tateishi



 
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