Title:
ELASTIC SURFACE-WAVE DEVICE
Document Type and Number:
Japanese Patent JP2016058960
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an elastic surface-wave device which is hard to cause the degradation in characteristics even if a piezoelectric material is made a high temperature.SOLUTION: An elastic surface-wave device 1 comprises: a base material 2; and a protection film 3 on one face 21a of the base material 2, which includes a silicon nitride as a primary component. In the elastic surface-wave device 1, a piezoelectric material 21 is covered with the protection film 3 including a silicon nitride as a primary component and thus, the transformation of the piezoelectric material 21 (scandium-containing aluminum nitride) owing to a high temperature is suppressed. As a result, the degradation in characteristics of the elastic surface-wave device 1 owing to transformation of the piezoelectric material 21 (scandium-containing aluminum nitride) is suppressed.SELECTED DRAWING: Figure 1
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Inventors:
YAMAMOTO YASUO
TESHIGAWARA AKIHIKO
KANO KAZUHIKO
TESHIGAWARA AKIHIKO
KANO KAZUHIKO
Application Number:
JP2014185367A
Publication Date:
April 21, 2016
Filing Date:
September 11, 2014
Export Citation:
Assignee:
DENSO CORP
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| JP2008244523A | 2008-10-09 | |||
| JP2009010926A | 2009-01-15 | |||
| JPH11274883A | 1999-10-08 |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office