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Title:
ELECTRIC POTENTIAL SENSOR
Document Type and Number:
Japanese Patent JP2007093439
Kind Code:
A
Abstract:

To provide an electric potential sensor having an inexpensive structure, capable of suppressing increase in the electrostatic capacity between a detection electrode and a tuning fork oscillator to a minimum, and capable of making cost reduction of the detection electrode and maintenance of its performance coexist.

The electric potential sensor is composed of the detection electrode counterposed to a surface to be measured being an object of potential measurement, and the tuning fork oscillator composed of two oscillating arms for periodically changing the facing area between the detection electrode and the surface to be measured. In this case, the detection electrode is made of metal and has a cylindrical structure, and its cost can be reduced while maintaining the conventional performance.


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Inventors:
MINE RYUTA
Application Number:
JP2005284485A
Publication Date:
April 12, 2007
Filing Date:
September 29, 2005
Export Citation:
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Assignee:
CANON KK
International Classes:
G01R29/12; G03G21/00
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio