Title:
細孔が存在する原体表面のエッチング方法
Document Type and Number:
Japanese Patent JP4217885
Kind Code:
B2
Inventors:
Kazuyoshi Honda
Makoto Tsunashima
Makoto Tsunashima
Application Number:
JP2003172272A
Publication Date:
February 04, 2009
Filing Date:
June 17, 2003
Export Citation:
Assignee:
Gemco Co., Ltd.
International Classes:
C03C15/02; H01L21/306; C23F1/00
Domestic Patent References:
| JP10312989A | ||||
| JP2001123281A |
Attorney, Agent or Firm:
Hiroshi Chiba