Title:
FILTRATION METHOD OF CMP DRAIN
Document Type and Number:
Japanese Patent JP3825648
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a filtration method to remove a nonremoved matter by using a filter made of a solid matter different from the nonremoved matter from drain mixed with the nonremoved matter of a semiconductor, metal, an inorganic matter, an organic matter, etc., discharged from a CMP device.
SOLUTION: The solid matter 12 trapped by a first filter 10 having irregularities is filtered by using it as a second filter 13 in a first tank 75. It is possible to prevent clogging as movement of the solid matter 12 comes to be possible when external force is applied to a surface of this second filter 13. Thereby, it becomes possible to continue filtration and to increase concentration of CMP drain.
Inventors:
Motoyuki Contrast
Hirofumi Iinuma
Hirofumi Iinuma
Application Number:
JP2001105542A
Publication Date:
September 27, 2006
Filing Date:
December 14, 1999
Export Citation:
Assignee:
Sanyo Electric Co., Ltd.
International Classes:
B24B57/02; B01D29/01; B01D29/62; B01D29/66; B01D37/02; B01D65/02; B24B37/00; C02F1/44; H01L21/304; (IPC1-7): B24B57/02; B01D29/01; B01D29/62; B01D29/66; B01D37/02; B01D65/02; B24B37/00; C02F1/44; H01L21/304
Domestic Patent References:
| JP31014685Y1 | ||||
| JP5185078A | ||||
| JP7108114A | ||||
| JP7316846A | ||||
| JP11033372A | ||||
| JP2001038152A |
Attorney, Agent or Firm:
Takashi Okada