Title:
FLOATING BODY IN FLOATING APPARATUS
Document Type and Number:
Japanese Patent JP2001093965
Kind Code:
A
Abstract:
To provide a floating body in a floating apparatus which is adaptable to cassettes of different sizes, and easily, and compactly structured.
A floating body 5A comprises a cassette support 10 and a cassette clamp 20 in a main frame 7. The cassette support 10 has a floating pad 11 supporting a cassette 4, a slide base 13 slidable on a roll member 12, a shaft 14 piercing a ring member 6, and a tiltable member 15 tiltably supported below the shaft 14, and the shaft 14 is supported with shaft holders 18 from three directions. The cassette clamp 20 has a clamp lever 21 for clamping the cassette 4, a shaft 23 for oscillating the clamp lever 21, and a motor 25 for rotating the shaft 23, and two rollers 22 are attached to the clamp lever.
Inventors:
KIMATA KAZUO
NAKAMORI TAKAO
NAKAMORI TAKAO
Application Number:
JP36048399A
Publication Date:
April 06, 2001
Filing Date:
December 20, 1999
Export Citation:
Assignee:
ASSIST JAPAN KK
International Classes:
H01L21/683; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Akio Iida (1 person outside)