Title:
HEAT DISSIPATION PLATE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2012116750
Kind Code:
A
Abstract:
To provide a heat dissipation plate for a semiconductor device, which is high in heat conductivity and excellent in heat dissipation.
The heat dissipation plate for a semiconductor device includes an aluminum nitride sintered compact which contains 0.14 to 1.5 mass% of a Y element, a ratio (IAl2Y4O9/IAlN) of 0.002 to 0.06 of an X-ray diffraction intensity IAl2Y4O9 of an Al2Y4O9 (201 plane) to an X-ray diffraction intensity IAlN of an aluminum nitride (101 plane), a ratio (IY2O3/IAlN) of 0.008 to 0.06 of an X-ray diffraction intensity IY2O3 of a Y2O3 (222 plane) to the X-ray diffraction intensity IAlN of the aluminum nitride (101 plane), a heat conductivity of ≥240 W/m-K, and a three-point bending strength of ≥200 MPa.
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Inventors:
KOMATSU MICHIYASU
MIYASHITA KIMIYA
MIYASHITA KIMIYA
Application Number:
JP2012010109A
Publication Date:
June 21, 2012
Filing Date:
January 20, 2012
Export Citation:
Assignee:
TOSHIBA CORP
TOSHIBA MATERIALS CO LTD
TOSHIBA MATERIALS CO LTD
International Classes:
C04B35/581; C04B35/638; H01L23/15; H01L23/373
Domestic Patent References:
JPH05105525A | 1993-04-27 | |||
JPH08508461A | 1996-09-10 | |||
JPH0881263A | 1996-03-26 | |||
JP2001233676A | 2001-08-28 | |||
JP2002201072A | 2002-07-16 | |||
JPH05105525A | 1993-04-27 | |||
JPH08508461A | 1996-09-10 | |||
JPH0881263A | 1996-03-26 | |||
JP2001233676A | 2001-08-28 |
Attorney, Agent or Firm:
Patent business corporation Tokyo International Patent Office