To provide a compact hybrid actuator having excellent vibration-free performance.
This hybrid actuator 1 is provided with a gas actuator 11 to be applied in a vertical direction to a subject body, a flat coil type linear motor 12 applied in one lateral direction to the subject body, a shearing force cut-off member 13 to cut-off transmission of shearing force applied in the lateral direction, a vibration sensor to detect vibrating conditions of the subject body in the vertical direction and the lateral direction, a displacement sensor to detect displacement conditions of the subject boy in the vertical direction, and a control part 17 to output signals for offsetting vibration of the subject body to drive operation parts 15 and 16, and make output to drive operation part 15 based on signals from the displacement sensor. The gas actuator 11, the flat coil type linear motor 12, and the shearing force cut-off member 13 are serially disposed in the vertical direction.
WO/1997/013929 | CONTROL SYSTEM FOR CONSTRUCTION MACHINE |
WO/2012/145290 | LOAD HOLDING FOR METERLESS CONTROL OF ACTUATORS |
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