Title:
INGOT SLICE TABLE MANUFACTURING SYSTEM
Document Type and Number:
Japanese Patent JP2019089164
Kind Code:
A
Abstract:
To provide an ingot slice table manufacturing system for enabling easy reuse of scraps which are generated when slicing an ingot.SOLUTION: An ingot slice table manufacturing system 10 comprises: a wire saw 12; a supply unit 16 for a working fluid 14; a tank 18; a solid-liquid separator 20; a dryer 22; and a molding apparatus 26 for a slice table 24b. The manufactured slice table 24b uses particles obtained by the manufacturing system 10, and therefore, is formed in such a manner that particles containing an ingot 28 are hardened with a binder. If the ingot 28 comprises Si, Si particles are contained in the slice table 24b.SELECTED DRAWING: Figure 1
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Inventors:
GESHI TATSURO
YAMAGUCHI KOJI
FUKUDA TATSUJI
YAMAGUCHI KOJI
FUKUDA TATSUJI
Application Number:
JP2017219628A
Publication Date:
June 13, 2019
Filing Date:
November 15, 2017
Export Citation:
Assignee:
TKX CORP
International Classes:
B24B55/12; B24B27/06; B28D5/04; B28D7/02; B28D7/04; H01L21/304
Attorney, Agent or Firm:
Takayoshi Kusumoto
Tsuneo Fujikawa
Satoshi Mikumo
Yu Mori
Shigeki Nakagawa
Takuro Hiramatsu
Tsuneo Fujikawa
Satoshi Mikumo
Yu Mori
Shigeki Nakagawa
Takuro Hiramatsu