To provide an ink jet head having an organic insulating film with a high adhesion strength to a nozzle plate without a decrease in the reliability related to insulation, a decrease in the structural reliability and a decrease in the reliability of the ink jet head.
Particles 201 soluble into water or the like are dispersed near a surface of a polyparaxylylene film used for the organic insulating film 200, and a part of particles 201 is exposed by a plasma process with oxygen radicals. Thereafter, particles 201 are eluted by etching, and dents and bumps 202 are formed to the surface of the organic insulating film 200. An anchoring effect when the nozzle plate 9 is bonded is enhanced, thereby increasing the adhesion strength of the nozzle plate 9. The reliability of the ink jet head is improved accordingly.
KAKIWAKI NARIMITSU
TANAKA ATSUSHI
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