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Title:
IRREGULAR PATTERN INSPECTING APPARATUS AND IRREGULAR PATTERN INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2005114630
Kind Code:
A
Abstract:

To provide an irregular pattern detector and an irregular pattern detection method for easily detecting minute defects of irregular patterns, such as a mold release pattern in a groove, in an optical recording medium, or the like.

The irregular pattern detector comprises a light-irradiating means 11 for irradiating the surface of a body 1 to be inspected having the irregular pattern 2 with light; a retaining/moving means 12 for at least retaining and moving the body 1 to be inspected; and a light-detecting means 13 for receiving the secondary diffraction light component of the reflected light and/or transmitted light from the body 1 to be inspected.


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Inventors:
NAKAYAMA HIROSHI
MIYATA KAZUTOMO
NEMOTO JUNICHI
HATAYAMA HITOSHI
Application Number:
JP2003351363A
Publication Date:
April 28, 2005
Filing Date:
October 09, 2003
Export Citation:
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Assignee:
SONY CORP
International Classes:
G01N21/95; G01M11/00; G11B7/26; (IPC1-7): G01N21/95; G01M11/00; G11B7/26
Domestic Patent References:
JPS63266345A1988-11-02
JPS57184957A1982-11-13
JPS52146601A1977-12-06
JPH06148088A1994-05-27
JPH0326908A1991-02-05
JPH0527256B21993-04-20
JPH02264848A1990-10-29
JPH0862150A1996-03-08
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hironobu Isoyama



 
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