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Patent Searching and Data


Title:
LANGASITE SINGLE CRYSTAL WAFER AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2002284598
Kind Code:
A
Abstract:

To provide a langasite single crystal wafer which has triple rotation Euler's angles, and which has both excellent surface-acoustic-wave characteristics and extremely excellent and stable accuracy of orientation working, and to provide a method for manufacturing the same.

The langasite single crystal wafer has triple rotation Euler's angles (30°, 20°≤θ≤30°, ψ). The method for manufacturing the wafer is carried out as follows: a langasite single crystal is grown; the plane index [113] or [225] of the langasite single crystal is specified by means of X-ray diffraction measurement; and the langasite single crystal is worked into the langasite single crystal wafer, making the plane index [113] or [225] an orientation reference for a wafer plane.


Inventors:
SHIONO YOSHIYUKI
Application Number:
JP2001091997A
Publication Date:
October 03, 2002
Filing Date:
March 28, 2001
Export Citation:
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Assignee:
SHINETSU CHEMICAL CO
International Classes:
C30B29/34; H03H9/25; (IPC1-7): C30B29/34
Attorney, Agent or Firm:
Mikio Yoshimiya