Title:
LINEAR GUIDANCE DEVICE
Document Type and Number:
Japanese Patent JP3523510
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To stably control a mobile stage without generating any vibration in a state that straightness is highly precisely held in a linear guidance device equipped with a mobile stage having an opening at the center.
SOLUTION: A mobile stage 1 having an opening at the center is guided by a pair of guide members 3a and 3b set on a base foundation 2, and a pair of members 7a and 7b to be driven are arranged on the base foundation 2 between the pair of guide members 3a and 3b on a straight line and in parallel with the guide members 3a and 3b. Also, ultrasonic motors 6a and 6b set in mobile stages 6a and 6b are butted to each member 7a and 7b to be driven from the same direction. Then, a control system is constituted of a position detecting means 11 for measuring the displacement of the mobile stage 1, control part 9 for performing a PID arithmetic operation based on a parameter based on position deflection between the position signal and a preliminarily set position signal, and for outputting a command signal and driving drivers 10a and 10b for outputting a command voltage to each ultrasonic motor 6a and 6b based on the command signal.
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Inventors:
Akashi, Koji
Application Number:
JP33934798A
Publication Date:
April 26, 2004
Filing Date:
November 30, 1998
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L21/027; F16C29/00; G03F7/20; G05D3/00; G05D3/12; H02N2/00; (IPC1-7): G05D3/00; F16C29/00; G05D3/12; H01L21/027; H02N2/00
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