LIQUID JET HEAD AND LIQUID JET DEVICE

Japanese Patent JP2022057159

A

To provide a liquid jet head that can reduce occurrence of cracks or the like of a vibration plate, and a liquid jet device.SOLUTION: A liquid jet head comprises: a nozzle plate having a nozzle that jets liquid; a pressure chamber substrate having a wall surface forming a pressure chamber communicating with the nozzle; a vibration plate arranged at an opposite side of the nozzle plate with respect to the pressure chamber substrate; a piezoelectric element having a first electrode, a piezoelectric body layer and a second electrode in this order when viewed from the vibration plate; and a protective film arranged on the vibration plate and on a portion of the wall surface. A portion corresponding to 90% of a thickness of the vibration plate is a first amorphous layer having a first layer and a second layer laminated with each other, or a laminated layer having a second amorphous layer and a metal layer laminated with each other, or a laminated layer having a third amorphous layer and a carbon layer including any of diamond-like carbon, graphene and carbon nanotube laminated with each other.SELECTED DRAWING: Figure 5

JP2019209669	LIQUID DISCHARGE HEAD AND METHOD FOR PRODUCING LIQUID DISCHARGE HEAD
JPS6235852	RECORDING APPARATUS
WO/2002/032671	ACTUATOR ANCHOR

TONOMURA OSAMU
FURUIKE HARUNOBU
YAMAZAKI YASUSHI
NAKAYAMA MASAO
SUGIYAMA TAKATOSHI

JP2020165271A

April 11, 2022

September 30, 2020

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SEIKO EPSON CORP

B41J2/14; B41J2/16; H01L41/053; H01L41/09; H01L41/319

Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura

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