Title:
MEMSマイクロホン
Document Type and Number:
Japanese Patent JP5108533
Kind Code:
B2
Abstract:
The microphone has microphone membrane (M1) and an auxiliary membrane (M2), which are connected with a closed air volume. The membranes are electrically coupled so that a movement of the auxiliary membrane is effected simultaneously during movement of the microphone membrane. A base has two openings (AU1, AU2), which flow into a hollow space (HR2) that is formed within the base.
Inventors:
Anton Riddle
Wolfgang Pearl
Ulrich Wolf
Wolfgang Pearl
Ulrich Wolf
Application Number:
JP2007556516A
Publication Date:
December 26, 2012
Filing Date:
February 08, 2006
Export Citation:
Assignee:
EPCOS AG
International Classes:
H04R1/28; B81B3/00; H04R3/00
Domestic Patent References:
| JP11508101A | ||||
| JP62230297A | ||||
| JP57207500A | ||||
| JP2001157298A | ||||
| JP4281696A |
Other References:
BAY J,INT. CONF. EUROSENSORS,スウェーデン,1995年 6月25日,V2,P700-703
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno
Previous Patent: 窒化物半導体発光装置
Next Patent: METHOD FOR SETTING UP SYSTEM CONSTITUTION FOR DATA PROCESSING SYSTEM, DATA PROCESSING SYSTEM AND EXT...
Next Patent: METHOD FOR SETTING UP SYSTEM CONSTITUTION FOR DATA PROCESSING SYSTEM, DATA PROCESSING SYSTEM AND EXT...