PURPOSE: To improve damp-proof properties, and to obtain a feedthrough suitable for a submarine optical repeater, by forming a hydrophobic resin film by plasma polymerization on at least one surface of sealing resin after injecting the sealing resin into a feedthrough mold and then curing it.
CONSTITUTION: A feedthrough 5 is mounted on a sample base 24 and inserted into a chamber 11, and it is installed at the center part between electrodes 12A and 12B. Then, the opening 11A of the chamber 11 is sealed airtightly with a cover 25 and an O ring 26. For this purpose, while a valve 19 is closed and a valve 15 is opened, a vacuum pump 13 is operated to adjust the pressure in the chamber 11 until a capacitance gauge 14 indicates 10-1Torr while the flow rate of tetrafluoroethylene gas is equal to that of argon gas. After the presure in the chamber 11 becomes steady, 30W electric power is supplied between the electrodes 12A and 12B from a 13.56MHz high frequency power source 22 through a matching network 23. Every time the electric power is supplied to the electrodes 12A and 12B for one minute, a polymerized film 31 of polytetrafluoroethylene with an about 500 thickness is formed.
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MARUNO TOORU
NAKAMURA KOUZABUROU
