To manufacture a laminated piezoelectric actuator having an excellent thermal resistance and an excellent response by respectively using an adhesive having a high thermal resistance and a large elastic modulus, insulating materials having a high thermal resistance and external materials having a high thermal resistance.
After drying green sheet provided with internal electrode layers 4, a laminated body is fabricated by stacking sixty green sheets 3 and protective layer 1, 2 on the top and the bottom surface respectively. Next, a joint body is formed by applying an adhesive 5 on the laminated body. The adhesive is made of amorphous glass in a PbO-SiO2-Al2O3 system. The adhesive has a thermal resistant temperature of more than 150°C and an elastic module of more than 5×104 Mpa after heating treatment. Next, the laminated body is covered every other layers using internal electrode levers, Thus an insulation layers 6 are formed. The insulation materials are made of amorphous glass in ZnO-Al2O system. After heating treatment, the insulation materials have a thermal resistant temperature of more than 150°C. Finally, an external electrode 7 is formed so as to apply power by covering the insulation layers 6.
SUZUKI HIDEO
MIYATA MOTOYUKI
SHIONO OSAMU
HAYASHIBARA MITSUO
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