ZINC OXIDE PIEZOELECTRIC BODY AND ITS MANUFACTURE

Title:

ZINC OXIDE PIEZOELECTRIC BODY AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JP2000031559

Kind Code:

A

Abstract:

To manufacture a large-sized zinc oxide piezoelectric body having excellent piezoelectric performance.

In a reducing atmosphere flowing at a constant flow rate, zinc oxide is heated and sublimated. The atmosphere containing the sublimated zinc oxide is brought into contact with a plate at a low temperature, and zinc oxide is deposited on the plate, thereby forming a zinc oxide film. A plurality of zinc oxide films 11, 12 formed in this manner are pressed with alumina blocks 21, 22 at a high temperature. As a result, the zinc oxide films 11, 12 are bonded to each other, and a zinc oxide piezoelectric body is completed.

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Inventors:

FUJIZU SATORU
ISHIMORI FUMITAKA
KONDO TAKASHI

Application Number:

JP19915598A

Publication Date:

January 28, 2000

Filing Date:

July 14, 1998

Export Citation:

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Assignee:

SEKISUI PLASTICS

International Classes:

C01G9/02; H01L41/09; H01L41/312; H01L41/316; H01L41/39; (IPC1-7): H01L41/24; C01G9/02; H01L41/09

Attorney, Agent or Firm:

Hirokatsu Kamei (2 outside)

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