To obtain fixed areas for additional structural section having a minimum value of 4 μm×4 μm and 3 μm interval for the typical case in relation to publicly known solution.
In a method for manufacturing a micro-mechanical type device provided with a fixed area 132 on a substrate, an adhesive layer 30 is formed and structured on a substrate provided with a base area for receiving the fixed area 132, and the fixed area 132 having a nearly island shape in the cutout 120 of the adhesive layer 30 is formed in the base area. This fixed area 132 is connected to the remaining part of the adhesive layer 30 only by at least one thin web 130, and a mask not masking the fixed area 132 and the growing area 133 adjacent to the fixed area 132 is formed on the adhesive layer 30, and a plating layer is precipitated on the fixed area 132, which is unmasked to make this fixed are 132 grow on the growing area 133 adjacent to the fixed area 132, and the mask and a part of the adhesive layer 30, which does not grow, are removed.
ELSNER BERNHARD
JP2002500390A | 2002-01-08 |