Title:
MANUFACTURE OF ORGANIC ELECTROLUMINESCENT ELEMENT AND ITS DEVICE
Document Type and Number:
Japanese Patent JP3520024
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To manufactured an organic EL element without temporarily returning the pressure to a normal pressure for each process, by forming a plurality of layer shaped portions of at least a part of the organic EL element in a plurality of a vacuum chamber formed around a vacuum tank, and taking out then after formation of a protective film.
SOLUTION: An organic EL wafer 4 having a transparent electrode on a glass substrate is held on a holding plate, held by a tip holding portion 3 of a robot 2 in a vacuum chamber 11, and inserted into a vacuum tank 1 to be vacuumed. A gate valve 20 of the vacuum chamber 11 is opened, the organic EL wafer 4 is held by a support base 6, and a positive hole injection transportation layer is deposited. Thus, after a luminescent layer is deposited on the organic EL wafer 4 in a vacuum chamber 12 for work, an electron injection transportation layer is deposited in a vacuum chamber 13, a positive electrode is deposited in a vacuum chamber 14, an Si layer is spattered in a vacuum chamber 15, and a protective film is formed in a vacuum chamber 16, pressure of the vacuum tank 1 is returned to a normal pressure, and the organic EL element is taken out of a substrate insertion taking portion 10.
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Inventors:
Arai, Michio
Nakatani, Kenji
Nanba, Noriyoshi
Nakatani, Kenji
Nanba, Noriyoshi
Application Number:
JP2000096768A
Publication Date:
April 19, 2004
Filing Date:
October 07, 1994
Export Citation:
Assignee:
TDK CORP
International Classes:
H05B33/10; H01L51/50; H05B33/12; H05B33/14; (IPC1-7): H05B33/10; H05B33/14
Attorney, Agent or Firm:
山谷 晧榮 （外２名）