Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR FORMING COPPER PATTERN, AND METHOD FOR MANUFACTURING IMAGE FORMING APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2012021184
Kind Code:
A
Abstract:

To make it possible to easily form, without severely lowering the productivity, a copper pattern 4' having a cross-sectional shape of a forward tapered shape when a copper film 4 deposited by electrolytic plating is etched to form the copper pattern 4'.

A method for forming a copper pattern includes a step for depositing a copper film 4 separately into a first copper film 4a and a second copper film 4b by using a first plating bath and a second bath, each containing a plating solution, and a step for making adjustments according to one or more of the following (A), (B), and (C): (A) making the concentration of a brightening agent of the plating solution used in the plating bath for depositing the first copper film 4a higher than that of the plating solution used in the plating bath for depositing the second copper film 4b; (B) making the concentration of a smoothing agent of the plating solution used in the plating bath for depositing the first copper film 4a lower than that of the plating solution used in the plating bath for depositing the second copper film 4b; and (C) making the temperature of the plating solution used in the plating bath for depositing the first copper film 4a higher than that of the plating solution used in the plating bath for depositing the second copper film 4b.


Inventors:
UKIYO NORITAKA
Application Number:
JP2010158606A
Publication Date:
February 02, 2012
Filing Date:
July 13, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
C25D5/10; C23F1/18
Attorney, Agent or Firm:
Keisuke Watanabe
Yoshihiro Yamaguchi