Title:
METHOD FOR MACHINING PLATE GLASS SURFACE
Document Type and Number:
Japanese Patent JP2001198800
Kind Code:
A
Abstract:
To provide a method for mirror finishing with excellent finished surface roughness efficiently in polishing the surface of plate glass.
A method for machining the surface of the plate glass is to polish the plate glass while supplying aqueous slurry containing cerium oxide fine particles to a work face of a grinding wheel formed from a resin grinding wheel for polishing. As for the resin grinding wheel abrasive grain fine particles comprising condensation products of polyvinyl alcohol and aldehyde and cured body made of a thermosetting resin fixed as bonding material are selectively used.
More Like This:
JP4272757 | Grinding device |
JP7173879 | Polishing composition and polishing system |
JPH05228733 | VERTICAL PRECISION THREAD LAPPING MACHINE |
Inventors:
KOJIMA TAKAHITO
Application Number:
JP2000011758A
Publication Date:
July 24, 2001
Filing Date:
January 20, 2000
Export Citation:
Assignee:
SPEEDFAM CO LTD
International Classes:
B24B37/00; C03C19/00; C09K3/14; G11B5/84; (IPC1-7): B24B37/00; G11B5/84
Attorney, Agent or Firm:
Hiroshi Tanaka (1 outside)
Previous Patent: METHOD FOR POLISHING SEMICONDUCTOR WAFER
Next Patent: POLISHING DEVICE AND POLISHING METHOD
Next Patent: POLISHING DEVICE AND POLISHING METHOD