Title:
METHOD OF MANUFACTURING ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING CERAMIC HEATER
Document Type and Number:
Japanese Patent JP2001274229
Kind Code:
A
Abstract:
To provide an electrostatic chuck, whose chucking force does not vary with position and which can attract a semiconductor wafer uniformly.
In this method of manufacturing the electrostatic chuck, a conductive paste for electrodes is printed on a green sheet having a thickness variation of -10% to +10% with respect to average thickness. Subsequently, other green sheets are laminated on the above green sheet to form a laminate and then sintered.
Inventors:
HIRAMATSU YASUJI
ITO YASUTAKA
ITO YASUTAKA
Application Number:
JP2000083972A
Publication Date:
October 05, 2001
Filing Date:
March 24, 2000
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
H05B3/20; B28B11/00; H01L21/302; H01L21/3065; H01L21/68; H01L21/683; H05B3/18; (IPC1-7): H01L21/68; B28B11/00; H01L21/3065; H05B3/18; H05B3/20
Attorney, Agent or Firm:
Yasuo Yasutomi (2 outside)
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