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Title:
MOLD FOR MICRO-PARTS AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2003013160
Kind Code:
A
Abstract:

To provide a mold for micro-parts having high precision and a low manufacturing cost, and a manufacturing method therefor.

This manufacturing method comprises preparing an original mold 5 of the mold for micro-parts, by machining the surface of a Si substrate by a lithography method, a dry etching method, or the like, and transferring the original mold 5 to a titanium alloy 7 having superplasticity.


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Inventors:
OGAWA ATSUSHI
MIHARA YUTAKA
HASHIGUCHI GEN
OHIRA FUMIKAZU
YOSHIMURA HIDENORI
CHIKASHIGE KIYOSHI
Application Number:
JP2001203689A
Publication Date:
January 15, 2003
Filing Date:
July 04, 2001
Export Citation:
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Assignee:
NIPPON KOKAN KK
MIHARA YUTAKA
HASHIGUCHI GEN
OHIRA FUMIKAZU
YOSHIMURA HIDENORI
ADVANEX INC
International Classes:
B81C1/00; B81C99/00; C22C14/00; (IPC1-7): C22C14/00; B81C1/00; B81C5/00
Domestic Patent References:
JP2000322780A2000-11-24
JPH07258810A1995-10-09
JPH03274238A1991-12-05
JPH07150274A1995-06-13
JPS5571515A1980-05-29
Attorney, Agent or Firm:
Yasuo Ishikawa



 
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