Title:
EXHAUST VACUUM PUMP FOR VACUUM MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JPH0626460
Kind Code:
A
Abstract:
PURPOSE: To provide an exhaust vacuum pump for vacuum manufacturing device which can predict the adhesion and blocking of a reaction product to an exhaust system.
CONSTITUTION: This exhaust vacuum pump 2 for vacuum manufacturing device 1 is provided with an ammeter 5 for measuring the operating current of a motor 3 and thermometer 4 for measuring temperature in the exhaust pipe of the pump to provide a diagnostic device 6 which detects the blocking of an exhaust system by utilizing the output of the ammeter 5 and/or the thermometer 4.
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Inventors:
TSUJIMURA MANABU
ARIMITSU HIDENOBU
KATO TADAO
ARIMITSU HIDENOBU
KATO TADAO
Application Number:
JP16680092A
Publication Date:
February 01, 1994
Filing Date:
June 03, 1992
Export Citation:
Assignee:
EBARA INFILCO
EBARA CORP
EBARA RES CO LTD
EBARA CORP
EBARA RES CO LTD
International Classes:
F04B37/16; (IPC1-7): F04B37/16
Attorney, Agent or Firm:
Katsura Yoshimine (1 person outside)
Next Patent: ELECTRICAL EQUIPMENT PROTECTOR FOR COMPRESSOR