SCANNING TUNNEL MICROSCOPE

Japanese Patent JPH0593604

A

PURPOSE:To reproduce the scanning position before the replacement of a probe after the probe is replaced by providing the probe for scanning a surface, a driving mechanism for displacements in the axial direction and the perpendicular direction with regard to the axial direction, an approaching mechanism, a stopper and a stopper driving mechanism. CONSTITUTION:A direct-action, driving part 12 is displaced up and down, and first and second arms 7 and 8 are turned. Thus, a sample 2 is moved from a scanning position. Then, the driving part 12 is displaced upward, and the arms 7 and 8 are turned with a supporting point 9 as a center as a unitary body. The relative distance between a probe 1 and the sample 2 is shortened. The point in the vicinity of the sample 2 is brought into contact with a stopper 4. The driving part 12 is further displaced upward. Then, the arm 8 is turned with the contact point of the sample with the stopper as the supporting point. the probe 1 and the sample 2 are sufficiently brought close, and the driving part 12 is stopped. The probe 1 is made to extend in the axial direction and slowly contracted from the position, where a PZT element 6 is made to extend utmost. Whether a tunnel current can be detected or not is checked. When the tunnel current is detected, the position is stored, the element 6 is made to extend and the stopper 4 is made to protrude.

JPH07325091	SCANNING PROBE MICROSCOPE
JPH0752618	[Name of invention] probe scanning microscope microscope

FUJITA YOSHIJI
SUMITA KUNYU

JP25337691A

April 16, 1993

October 01, 1991

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MATSUSHITA ELECTRIC IND CO LTD

G01B7/34; G01N37/00; G01Q10/02; G01Q60/10; H01J37/28; (IPC1-7): G01B7/34; H01J37/28

Akira Kobiji (2 outside)

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