Title:
OPTICAL FILM THICKNESS MONITOR
Document Type and Number:
Japanese Patent JPH0526624
Kind Code:
A
Abstract:
PURPOSE:To provide a small optical film thickness monitor capable of being manufactured at a low cost and requiring no large fitting space around a vacuum chamber by adjacently providing a light emitting element and a light receiving element utilizing the photoelectric effect. CONSTITUTION:A light emitting element 15 and a light receiving element 16 are adjacently set toward a board face in a vacuum chamber 1 or a monitor glass 13, and the optical axes of the elements 15, 16 are crossed and fixed in front of the light emitting face and the light receiving face. The light with a specific wavelength is projected from the element 15 to a translucent thin film formed on the board face of the monitor glass 13, and the reflected light is received by the element 16. When the thickness of the thin film becomes integer times the 1/4-wavelength of the light of the element 15, the current or the voltage detected by the element 16 becomes the maximum or minimum, and the thickness of the thin film accumulated on a board 2 can be measured.
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Inventors:
IIJIMA MASAYUKI
Application Number:
JP17698591A
Publication Date:
February 02, 1993
Filing Date:
July 17, 1991
Export Citation:
Assignee:
ULVAC CORP
International Classes:
G01B11/06; (IPC1-7): G01B11/06
Attorney, Agent or Firm:
Kinichi Kitamura (2 others)
Next Patent: JPH0526625