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Patent Searching and Data


Title:
OXIME SULFONATE COMPOUND
Document Type and Number:
Japanese Patent JP2008162984
Kind Code:
A
Abstract:

To provide a novel compound useful as a monomer for a polymer compound utilizable as a component of a resist composition and a novel compound useful for manufacturing the compound.

The compound is represented by general formula (I) [wherein R1 is a hydrogen atom or a methyl group; R2 is a 1-5C straight-chain or branched-chain alkylene or fluorinated alkylene group; R3 is an optionally substituted phenyl or naphthyl group; and R4 is a 1-5C fluorinated alkyl group]. A compound represented by general formula (III-1), a compound represented by general formula (IV-1) and a compound represented by general formula (V-1) are also provided.


Inventors:
MOTOKI YOSHIAKI
ABE KAZUTAKA
Application Number:
JP2006356551A
Publication Date:
July 17, 2008
Filing Date:
December 28, 2006
Export Citation:
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Assignee:
NIPPON FINE CHEMICAL KK
International Classes:
C07C309/68; C07C33/46; C07C49/233; C07C251/48; C08F20/38
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Noriko Yanai