PATTERNING METHOD OF ORGANIC THIN FILM

Title:

PATTERNING METHOD OF ORGANIC THIN FILM

Document Type and Number:

Japanese Patent JP2002050610

Kind Code:

A

Abstract:

To selectively leave an organic thin film only in an insulation part, without employing photolithographic technique, when a conductive part and an insulation part are provided.

Electrolytic solution 22, consisting of water solution of sodium chloride, is stored in an electrolytic cell 20. A transparent electrode 26 is formed in a part of a glass substrate 24 and has an organic thin film 30, covering a substrate exposed part and the transparent electrode 26. The part of the transparent electrode 26, exposed from the electrolytic solution 22, is connected to the negative side of a d.c. power supply 28. A positive side of the d.c. power supply 28 is connected to an inert electrode 32, and electrolysis is carried out on applying d.c. voltage between the inert electrode 32 and the transparent electrode 26.

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Inventors:

SUZUKI TAKAYUKI
MORI YOSHIAKI
MIYAGAWA TAKUYA

Application Number:

JP2000234365A

Publication Date:

February 15, 2002

Filing Date:

August 02, 2000

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

H05B33/10; H01L21/3063; H05B33/26; (IPC1-7): H01L21/3063

Attorney, Agent or Firm:

Masanori Ueyanagi (1 outside)

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