Title:
圧電アクチュエータ、圧電式バルブ、及び圧電アクチュエータの製造方法
Document Type and Number:
Japanese Patent JP7193804
Kind Code:
B2
Abstract:
Provided is a piezoelectric actuator that can reduce a risk of air leakage due to weakening of pressing force of a valve element against a valve seat surface and airtightness.The piezoelectric actuator is used for a piezoelectric valve that opens and closes a valve utilizing displacement of a laminated piezoelectric element. The piezoelectric actuator includes: a valve element; a laminated piezoelectric element that generates a driving force, required for operation of the valve element, as a displacement; and a displacement enlargement mechanism that enlarges a displacement of a laminated piezoelectric element and causes the enlarged displacement to act on the valve element. In the piezoelectric actuator, a surface of the valve element to be in contact with a valve seat of the piezoelectric valve is made flat and smooth in a state in which a tensile load is applied to the laminated piezoelectric element.
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Inventors:
Takafumi Ito
Tadashi Matsushita
Toshiro Higuchi
Xu Seiji
Kunio Ebihara
Toshitada Hirata
Tadashi Matsushita
Toshiro Higuchi
Xu Seiji
Kunio Ebihara
Toshitada Hirata
Application Number:
JP2019105449A
Publication Date:
December 21, 2022
Filing Date:
June 05, 2019
Export Citation:
Assignee:
Satake Co., Ltd.
Mechano Transformer Co., Ltd.
Mechano Transformer Co., Ltd.
International Classes:
F16K31/02; F16K27/02
Domestic Patent References:
| JP9329252A | ||||
| JP3172688A |
Attorney, Agent or Firm:
Aiwa Patent Attorneys Corporation
Takuya Okano
Takuya Okano
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