To obtain a structure wherein action is stabilized and driving efficiency is high even when weight reduction, miniaturization and thinning of the structure are performed and displacement of a movable body is enlarged within limit of breakage of a piezoelectric body.
In a piezoelectric actuator wherein a vibrating body 3 or a moving body 4 installed on the vibrating body is driven by elastically vibrating the vibrating body 3 constituted of a piezoelectric body 2 and an elastic body 1 by applying an AC voltage to the piezoelectric body 2, the peripheral edge part of the vibrating body 3 is supported and fixed by means of a spring structure and the resonance frequency of the spring structure is set near the resonance frequency of the vibrating body 3.
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JP2004235366 | APPARATUS, METHOD, AND SYSTEM FOR ULTRASONIC WASHING |
MORITOKI KATSUNORI
IMADA KATSUMI
KAWASAKI OSAMU
TAKIMOTO NOBUHIRO
MINAMI KUNIHIKO
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