Title:
PLASMA PROCESSING DEVICE AND COMPONENT
Document Type and Number:
Japanese Patent JP2022173242
Kind Code:
A
Abstract:
To repair a consumable component.SOLUTION: A method of forming a component used in a plasma processing apparatus includes the steps of irradiating a raw material of a component with an energy beam while supplying the raw material according to the surface state of the component.SELECTED DRAWING: Figure 5
Inventors:
Saito Michishige
Kazuya Nagaseki
Shota Kaneko
Kazuya Nagaseki
Shota Kaneko
Application Number:
JP2022141218A
Publication Date:
November 18, 2022
Filing Date:
September 06, 2022
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; B22F1/00; B22F3/105; B22F10/25
Domestic Patent References:
| JP2018507327A | 2018-03-15 | |||
| JP2015506855A | 2015-03-05 | |||
| JP2017060735A | 2017-03-30 | |||
| JP2018032721A | 2018-03-01 | |||
| JP2017212427A | 2017-11-30 | |||
| JP2004266127A | 2004-09-24 |
Foreign References:
| WO2016178777A1 | 2016-11-10 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
Previous Patent: Image forming apparatus and its control method
Next Patent: camera body and lens barrel
Next Patent: camera body and lens barrel