PURPOSE: To efficiently form many microobjects by executing plating in the state of making a section where an equal speed is maintained longer than a section facing a surface to be plated.
CONSTITUTION: A paddle 18 starts progressing by a forward run command at one end P1 of the section W1 where the paddle moves back and forth. The progressing speed increases and attains a prescribed speed in a place P2. The paddle arrives at a place P3 in the state of the prescribed speed. This arrival is known by detection with a detector. The progressing speed of the paddle falls upon arrival at P3 and falls to zero at a place P4. The speed of the paddle is increased backward, is equaled in speed and decelerated by reverse running of the motor right thereafter. The equal speed section W2 is set at the same length as the length of the section where the paddle faces the surface to be plated or longer than this length and the plating surface is subjected to plating in this state. The uniformity and higher accuracy of the film thicknesses of the many microobjects are thus attained.
OSADA SEIICHI
IRIE KANJI
