To obtain a silica derivative which can hardly separate a removed substance by a method in which a group VIII metal catalyst is supported on a solid silica derivative having a Si-H linkage expressed by a specified formula, and a substance which can cause a hydrosililation reaction is removed at a high selectivity.

A group VIII metal catalyst is supported on a solid silica derivative having a Si-H linkage which is expressed by a general formula of HnSiO(4-n)/z (wherein (n) is a real number between 0-2). The reactive silica derivative is prepared by a method in which a hydrolysis-condensation reaction in a process in which the solid silica derivative having a Si-H linkage is prepared by a method in which a trialkoxysilane which is expressed by a general formula of H-Si(OR)3 (wherein R is a 1-4C alkyl group) is hyrolysis-condensed at pH10.5 or less by water of equivalent mole or more to the total alkoxy groups of the trialkoxysilane is performed in the presence of the group VIII metal catalyst or by a method in which the group VIII metal catalyst is added after the hydrolysis-condensation reaction.