レジスト材料及び積層体 - Sekisui Chemical Co.,Ltd.

Title:

レジスト材料及び積層体

Document Type and Number:

Japanese Patent JP4392464

Kind Code:

B2

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Inventors:

Hide Nakamura
Takashi Nishimura
Takashi Kage
Kunihiro Yoshitaka
Takashi Watanabe

Application Number:

JP2009501771A

Publication Date:

January 06, 2010

Filing Date:

January 14, 2009

Export Citation:

Assignee:

Sekisui Chemical Co.,Ltd.

International Classes:

G03F7/004; C08G59/20; C08G59/32; C08G77/14; G03F7/028; G03F7/038; G03F7/075; H01L33/00; H05K3/28

Domestic Patent References:

Foreign References:

WO2007125956A1

Attorney, Agent or Firm:

Miyazaki saki main tax
Table of contents Makoto

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