PURPOSE: To prevent dusts from entering from the periphery of a conveying apparatus to a sample side by providing a cover oppositely to the sample of the apparatus and supplying gas to a space between the sample and a cover.
CONSTITUTION: A wafer 11 is placed on the other lower end of an arm 61 to which one end is attached of a revolving unit to attach supporting frames 62a, 62b, and divided at width Y at a tracing portion at the center of the wafer 11 with respect to the revolving center of the arm 61. The width Y is a passage of an elevator for placing the wafer 11 in case of delivering the wafer 11. A cover frame 63 is attached to the other upper end of the arm 61, and a cover 64 is detachably engaged with the frame 63. A gas supplying unit 68 is connected through a pipe 67 with the arm 61 to supply clean gas to between the wafer 11 placed on the frames 62a, 62b and the cover 64. Thus, it can prevent dusts from entering from the outside of the frames 62a, 62b.
NAKATSUI FUJITSUGU
FUKUSHIMA YOSHICHIKA
KAWASAKI YOSHINAO
SORAOKA MINORU
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