PURPOSE: To isolate an atmosphere certainly as well as to exclude driving means for the sealing apparatus by providing a magnet tape to a bellow member arranged in a divided manner along a moving line of a moving member.

CONSTITUTION: By the bellow members 32, 34 which are divided along the moving line of a movable shaft which is the moving member as well as has the magnet tape 30 arranged along divided opposed surfaces, a treating chamber 12 and a mechanism part chamber 14 are partitioned. In order to separate close contact of the magnet tape 30 by left and right release shafts 36, 40 moving along with the movable shaft 18, the movement of the shaft 18 is not inhibited by said bellow members 32, 34 and the atmosphereof the mechanism part 14 and the corrosive atmosphere of the treating chamber are sealed.