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Title:
SEALING METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH03242944
Kind Code:
A
Abstract:

PURPOSE: To enable realization of a sealing method being excellent in mass production properties and having high reliability, by molding a liquid thermosetting sealing material by injecting it into a die heated to a high temperature beforehand.

CONSTITUTION: A thermosetting sealing material kept in a state of liquid at a lower temperature than the one of a molding die is put under pressure and injected into the molding die wherein a semiconductor device is held, and it is molded in the die having a higher temperature than the one of the thermosetting sealing material. kept in the state of liquid. For instance, a semiconductor element prepared by joining a semiconductor chip to a lead frame and by wire-bonding electrodes on the semiconductor chip to lead wires by using Au wires is held in the die heated to 150°C, and then liquid thermosetting epoxy resin heated to 80°C is injected under pressure. By holding the epoxy resin in the die for 120 seconds as it is, it is set thermally and a semiconductor device sealed and molded with the resin is obtained. According to this constitution, occurrence of a disconnection fault in a bonded part of the electrode of the semiconductor device and the wire, a short circuit fault therein due to contact with an adjacent wire, etc. can be prevented and the semiconductor device being excellent in reliability can be obtained.


Inventors:
TSUBAKI KAZUHIKO
YOKOZAWA MASAMI
Application Number:
JP3999990A
Publication Date:
October 29, 1991
Filing Date:
February 21, 1990
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01L21/56; (IPC1-7): H01L21/56
Attorney, Agent or Firm:
Shigetaka Awano (1 person outside)



 
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