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Title:
SEMICONDUCTOR-SORTING APPARATUS
Document Type and Number:
Japanese Patent JP2001210682
Kind Code:
A
Abstract:

To automatically put defect marks on chips that are located around a defective chip, when a continuous defect distribution is generated in measurement of a wafer.

A data file obtained by acquiring measurement result, with reference to the coordinates of each chip on a wafer, is converted to generate data, based on which failure marks are put.


Inventors:
TANIZAWA MICHIAKI
MATSUKAWA YASUHIRO
Application Number:
JP2000015997A
Publication Date:
August 03, 2001
Filing Date:
January 25, 2000
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
H01L21/02; G01R31/26; H01L21/66; (IPC1-7): H01L21/66; G01R31/26; H01L21/02
Domestic Patent References:
JPH0574880A1993-03-26
JPH04240743A1992-08-28
JPS61259536A1986-11-17
JPH04356938A1992-12-10
Attorney, Agent or Firm:
Keinosuke Hayashi



 
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