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Title:
SILICON CARBIDE FORMED PRODUCT HAVING OPTICAL TRANSPARENCY
Document Type and Number:
Japanese Patent JP2000211973
Kind Code:
A
Abstract:

To provide a silicon carbide formed product having optical transparency, having thermal and strength stability, excellent in optical transparency and suitably useful as optical lens, tubes for high-pressure discharge lamps, mask membrane for X-ray lithography, infrared filter or the like.

This formed product is a CVD-SiC one produced by the vapor phase deposition of SiO on the surface of a substrate by the chemical vapor deposition method(CVD) and then by removing the substrate. The formed product has a mirror finished surface having ≤10 nm surface roughness Ra after polished and the following optical characteristics: (1) the spectral absorption edge is located in the wavelength region of <500 nm; (2) the light transmittance is ≤50% in the wavelength region of 500-1,200 nm and is ≥50% in the wavelength region of >1,200 nm.


Inventors:
YASUNAKA TOMIYA
KANAI KENICHI
MIYATA TSUGUO
Application Number:
JP1508899A
Publication Date:
August 02, 2000
Filing Date:
January 25, 1999
Export Citation:
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Assignee:
TOKAI CARBON KK
International Classes:
C04B35/565; C01B31/36; C23C16/00; C23C16/01; C23C16/32; (IPC1-7): C04B35/565; C23C16/01; C23C16/32
Attorney, Agent or Firm:
Fukuda Yasuo (1 person outside)