SINGLE LAYER POLYCRYSTALLINE FLOATING GATE - UEHASUKEELE INTEGUREESHIYON IN

Title:

SINGLE LAYER POLYCRYSTALLINE FLOATING GATE

Document Type and Number:

Japanese Patent JPS63157480

Kind Code:

A

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Inventors:

BOAZU EITAN

Application Number:

JP30287286A

Publication Date:

June 30, 1988

Filing Date:

December 20, 1986

Export Citation:

Assignee:

UEHASUKEELE INTEGUREESHIYON IN

International Classes:

H01L21/8247; H01L21/8246; H01L27/10; H01L27/112; H01L29/78; H01L29/788; H01L29/792; (IPC1-7): H01L27/10; H01L29/78

Attorney, Agent or Firm:

Kazuo Kobashi

Previous Patent: JPS63157479

Next Patent: JPS63157481