Title:
SOLID-STATE IMAGING ELEMENT AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2023182872
Kind Code:
A
Abstract:
To provide a solid-state imaging element capable of reducing random noise in a pixel and suppressing crosstalk between adjacent pixels.SOLUTION: A solid-state imaging element includes: a substrate; a plurality of photoelectric conversion units that is provided in the substrate; a first insulation film that is provided between the plurality of photoelectric conversion units adjacent to each other among the plurality of photoelectric conversion units, and has a fixed charge provided on an inner wall of a trench penetrating between a first surface of the substrate and a second surface opposite to the first surface; a second insulation film that is provided on an inner side of the first insulation film in the trench; at least one transistor that is provided on the first surface of the substrate; and a third insulation film that is provided on both sides of the trench or along the trench when viewed from the first surface.SELECTED DRAWING: Figure 5
Inventors:
YOSHIDA SHINICHI
Application Number:
JP2020188719A
Publication Date:
December 27, 2023
Filing Date:
November 12, 2020
Export Citation:
Assignee:
SONY GROUP CORP
International Classes:
H01L27/146; H01L21/76; H01L21/8234; H04N25/70; H04N25/76
Attorney, Agent or Firm:
Yukitaka Nakamura
Satoru Asakura
Satoru Asakura