Title:
STICKING METHOD AND STICKING DEVICE OF PRESSURE-SENSITIVE ADHESIVE SHEET
Document Type and Number:
Japanese Patent JP2016032079
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To suppress occurrence of voids between a member to be stuck and a pressure-sensitive adhesive sheet.SOLUTION: When sticking a pressure-sensitive adhesive sheet 6 by holding a planar sticking member 3 having elasticity by means of a frame 4 in which an opening 4A is formed, arranging a member 8 to be stuck so as to face the sticking surface 3A of the sticking member 3, located in the opening 4A, at an interval, arranging the pressure-sensitive adhesive sheet 6 between the sticking surface 3A and the member 8 to be stuck, while directing the pressure-sensitive adhesive surface 6A toward the side of the member 8 to be stuck, supplying fluid to the side opposite from the sticking surface 3A and expanding the sticking member 3 from the opening 4A, thereby pressing the sticking surface 3A against the member 8 to be stuck, the interval h(×10m) of the sticking surface 3A of the sticking member 3 in a non-inflated state and the member 8 to be stuck, the diameter D(×10m) of a circle inscribing the opening 4A, and the supply amount Q(×10m/s) of fluid are controlled to satisfy a relationship; Q×(h/D)≥0.75(×10m/s).SELECTED DRAWING: Figure 2
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Inventors:
KANDA TOSHIMITSU
KANEKO SATOSHI
KANEKO SATOSHI
Application Number:
JP2014155294A
Publication Date:
March 07, 2016
Filing Date:
July 30, 2014
Export Citation:
Assignee:
LINTEC CORP
International Classes:
H01L21/683
Domestic Patent References:
| JP2009152424A | 2009-07-09 | |||
| JP2012511264A | 2012-05-17 | |||
| JPH0287545A | 1990-03-28 | |||
| JPH0590393A | 1993-04-09 | |||
| JP2012038880A | 2012-02-23 |
Foreign References:
| WO2012174707A1 | 2012-12-27 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Mitsunaga Igarashi
Tadashi Takahashi
Mitsunaga Igarashi