To make a price low, to prevent a protection sheet from bending and being caught between substrates, and to prevent a plurality of protection sheets from being caught between the substrates.

A shifter 5 is installed on a base 1 and an elevating equipment 6 shifted in a horizontal direction with the shifter 5 is provided. A rotary actuator 7 raised and lowered in a vertical direction with the elevating equipment 6 is provided and an L-shaped arm 8 is installed on an output shaft of the rotary actuator 7. The tip part of the arm 8 is provided with a wafer vacuum suction hand 9 and a carrying container 10 is disposed on the base 1. A protection sheet container 11 is installed on the base 1 and a shifter 12 is installed on the base 1. An elevating equipment 13 shifted in a horizontal direction with the shifter 12 is provided and a sheet vacuum suction hand 14 raised and lowered in a vertical direction with the elevating equipment 13 is provided.