Title:
SUPERCONDUCTIVE DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH05291634
Kind Code:
A
Abstract:
PURPOSE:To improve a tunnel current value by forming an irregular face where the degree of flatness is at a specified value or more, and forming an insulating layer on this irregular face. CONSTITUTION:For a substrate 1 consisting of StTiOa, Zr2O3, or the like, irregularity is made on the surface by etching so that the degree of flatness may be 5nm or more. A BKBO FILM 2 is made on this substrate 1 by sputtering, or the like. For the surface of this BKBO film, the BKBO is grown accompanied by its history by the irregularity of the board 1, and irregularity 5nm or more is made on the surface. And, for BKBO, a natural insulating barrier is made on the surface by the annealing or the like in O2 atmosphere. This insulating barrier 3 is used as an insulating layer for tunnel junction. A superconductive device is made by forming a metallic layer or a superconductive layer 4 on this insulating barrier 3. Hereby, the sectional area of a current increases, and the tunnel current value of quasiparticles can be improved.
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Inventors:
TAKAHASHI KAZUHIKO
SHIMAOKA KAZUHIRO
IYORI MASAHIRO
YAMANO KOJI
YOSHISATO MASANOBU
SHIMAOKA KAZUHIRO
IYORI MASAHIRO
YAMANO KOJI
YOSHISATO MASANOBU
Application Number:
JP12270692A
Publication Date:
November 05, 1993
Filing Date:
April 15, 1992
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01L39/22; H01L39/24; (IPC1-7): H01L39/22; H01L39/24
Attorney, Agent or Firm:
Torii Hiroshi
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