Title:
【発明の名称】高精度座標測定装置
Document Type and Number:
Japanese Patent JP3064614
Kind Code:
B2
Abstract:
PURPOSE:To make the moving part light and to obtain the conditions for excluding the errors in Abbe numbers in measurements of lengths and coordinates. CONSTITUTION:Optical interference is utilized in a length-measuring and coordinate- measuring apparatus. In this apparatus, an interferometer Ix is provided. The interferometer Ix comprises a base stage 1, to which a reflecting mirror Mx in fixed, and a movable holder 2, which can be moved in the direction orthogonal to the reflecting mirror Mx. The movable holder 2 has a position detector 3, a measuring optical system 30 and a reference optical system 20. The measuring optical system 30 and the reference optical system 20 have a measuring light path and a reference light path, wherein the light is reciprocated between the systems and the reflecting mirror Mx by N times (N is an integer of 2 or more) and M times (M is an integer smaller than N), respectively. The positions of these optical systems are set so as to satisfy the relationship NL=MD, where the L and D represent the distances from the measuring point to the optical axes of the measuring optical system and the reference optical system. Therefore, the errors in Abbe numbers can be eliminated, and the highly accurate measurement can be ensured. This is applicable when the interferometer is fixed on the base stage and the reflecting mirror is fixed to the movable holder.
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Inventors:
Hajime Morokuma
Application Number:
JP34478491A
Publication Date:
July 12, 2000
Filing Date:
December 26, 1991
Export Citation:
Assignee:
Olympus Optical Co., Ltd.
International Classes:
G01B9/02; G01B11/00; (IPC1-7): G01B11/00
Domestic Patent References:
| JP5157516A | ||||
| JP6254114A | ||||
| JP6279305A |
Attorney, Agent or Firm:
Taiji Shinohara (1 person outside)