TREATING LIQUID DISCHARGING NOZZLE AND TREATING LIQUID FEEDING DEVICE

Japanese Patent JP3722629

B2

PROBLEM TO BE SOLVED: To enable treating liquid to be discharged from a slit-like discharging port with uniform flow velocity distribution.
SOLUTION: A developer discharge nozzle 11 consists of a liquid puddle part 20 and a liquid discharge part 30. The liquid discharging part 30 is joined with the liquid paddle part 20 at one side face thereof. Inside the liquid puddle part 20, a liquid puddle space 22 is provided. In the liquid discharge part 30, there are formed plural tubular flow passages 36 communicating with a developer outlet of the liquid puddle part 20 and horizontally extending and plural tapered flow passages 34 gradually widening from the plural tubular flow passages 36 and leading to a slit-like discharge port 15. The plural tapered flow passages 34 are joined with each other and integrated into one body at a position from the plural tubular flow passages 36 to the slit like discharge port 15 or at a position of the slit-like discharge port 15.

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Shigehiro Goto
Hiroshi Kobayashi
Noriaki Matsunaga

JP30423998A

November 30, 2005

October 26, 1998

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Dainippon Screen Mfg. Co., Ltd.

G03F7/16; B05C5/02; B05C11/10; G03F7/30; H01L21/027; (IPC1-7): B05C5/02; B05C11/10; G03F7/16; G03F7/30; H01L21/027

JP53090350A
JP9103728A
JP8318193A
JP5261330A

Yoshito Fukushima

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