Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
VACUUM GENERATING MECHANISM IN PROCESSING MACHINE
Document Type and Number:
Japanese Patent JP2002151449
Kind Code:
A
Abstract:

To provide a vacuum generating mechanism in a processing machine for reducing the consumption of cooled water without using heat exchanger.

The vacuum generating mechanism in a processing machine used for generating suction force to a chuck table for holding a workpiece includes a water seal type vacuum pump having a suction hole, a drain hole, and a water feed hole; a suction path passed from the suction hole to the chuck table; a drain tank for storing the drain water discharged from the drain hole; a circulation path passed from the discharge tank to the water feed hole; a water feeding path passed to the water feed hole; a cool water flow rate adjustment means located at the water feed path for adjusting the flow rate of the cool water; a drain water temperature detecting means for detecting the temperature of the drain water stored in the drain tank; and a controller. When the temperature of the drain water stored in the drain tank reaches over a prescribed level, the controller causes the cool water flow rate adjustment means to increase the flow rate.


Inventors:
YOSHIDA MIKI
ARAI MASARU
Application Number:
JP2000344153A
Publication Date:
May 24, 2002
Filing Date:
November 10, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B23Q11/14; B23Q3/08; H01L21/301; H01L21/304; (IPC1-7): H01L21/304; B23Q3/08; B23Q11/14; H01L21/301
Domestic Patent References:
JPH09151873A1997-06-10
JPH0992711A1997-04-04
JPS611886A1986-01-07
Attorney, Agent or Firm:
Naozumi Ono